The PLATIT coating unit Pi411 uses the patented SCIL® technology (SPUTTERED Coating Induced by Lateral Glow Discharge) to achieve high deposition rates with SPUTTERING. SCIL® allows for high-performance SPUTTERING from the central cathode.
The cathode consists of:
The PLATIT 3D module (newly developed Helmholtz system) is used in the coating unit PL711 to offer the following advantages over conventional SPUTTER technology: