Hybrid LACS® (LAteral ARC with Central SPUTTERING):
- High ion density, excellent adhesion
- High deposition rates
- Introduction of “new” materials by SPUTTERING of ceramic targets
- Smoother coatings
Two different types of this hybrid technology can be applied in the Pi411 coating unit
1. Simultaneous deposition by LGD® & SCIL®
Lateral Glow Discharge & SPUTTERED Coating Induced by Lateral Glow Discharge
- To increase ion density and affect the coating properties of SPUTTER coatings
1 - 3: LARC® cathode
4: SCIL® cathode
2. Simultaneous deposition by LARC® & SCIL®
ARC evaporation with LAteral Rotating Cathode & SPUTTERED Coating Induced by Lateral Glow Discharge
- For targeted doping of coating components
1 - 3: LARC® cathode
4: SCIL® cathode
Learn more about the hybrid technology in the technical article "Hybrid Coating for Tooling".